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Etching AlAs with HF for epitaxial lift-off applications
Etching AlAs with HF for epitaxial lift-off applications
Article, Chapter
Authors: M.M.J. Voncken
Publication: Journal of the Electrochemical Society, Volume:151, Issue:5, Page(s):G347-G352
Published: IOP Publishing, 2004
ISSN: 0013-4651
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