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Chemical and physical sputtering effects on the surface morp…
Chemical and physical sputtering effects on the surface morphology of carbon films grown by plasma chemical vapor deposition
Chemical and physical sputtering effects on the surface morphology of carbon films grown by plasma chemical vapor deposition
Article, Chapter
Authors: L.
Publication: Journal of Applied Physics, Volume:106, Issue:3, Page(s):033504
Published: AIP Publishing
ISSN: 0021-8979
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