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Anodic etching of SiC in alkaline solutions

Article, Chapter

Authors: D.H. van Dorp

Publication: Journal of Micromechanics and Microengineering, Volume:17, Page(s):50-55

Published: IOP Publishing, 2007

ISSN: 0960-1317

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View Full Text Source:Journal of Micromechanics and Microengineering,Journal of Micromechanics and Microengineering,IOPscience extra Opens in new Window

Journal: Journal of Micromechanics and Microengineering Source:IOPscience extra Opens in new Window

Collection: IOPscience extra Opens in new Window

Coverage:

1991-03-01~present; volume:1~present;issue:1~present

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