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Fabrication of Sub-10 nm Metallic Lines of Low Line-Width Ro…
Fabrication of Sub-10 nm Metallic Lines of Low Line-Width Roughness by Hydrogen Reduction of Patterned Metal-Organic Materials
Fabrication of Sub-10 nm Metallic Lines of Low Line-Width Roughness by Hydrogen Reduction of Patterned Metal-Organic Materials
Article, Chapter
Authors: M. Nedelcu
Publication: Advanced Functional Materials, Volume:20, Issue:14, Page(s):-2323
Published: John Wiley and Sons, Ltd, 2010
ISSN: 1616-301X
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