Fabrication of Sub-10 nm Metallic Lines of Low Line-Width Ro…
Fabrication of Sub-10 nm Metallic Lines of Low Line-Width Roughness by Hydrogen Reduction of Patterned Metal-Organic Materials
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Coverage:
- 2001-02-01~present; volume:11~present;issue:1~present
Coverage:
- 2001~present; volume:11~present;issue:1~present